Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

The work gives a detailed introduction to the technology of flash lamp annealing, the corresponding physical background and an overview of the various applications of flash lamp annealing found in literature. It discusses a couple of issues which are relevant for process management with the focus on temperature measurement and temperature simulation. The application-related chapters include, inter alia, ultra-shallow junctions and hyperdoping in silicon, doping and superconductivity in germanium, silicon carbide, III-V semiconductors, diluted magnetic semiconductors, the crystallization of thin amorphous silicon films, semiconductor nanostructures, high-k materials, flash lamp annealing for monocrystalline, polycrystalline and thin film solar cells, transparent conducting oxides and flexible substrates.