Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationFlash lamp annealing of transparent conducting oxides and other thin films
Rebohle, L.; Schumann, T.; Prucnal, S.; Skorupa, W.
Abstract
This presentation gives a short overview about the technique of flash lamp annealing in general and current activities at HZDR related to this topic. Thereby, the focus is on the possibilities to maximize the UV output of the flash lamp the use for thin semi-transparent films, namely transparent conducting oxides.
Keywords: flash lamp annealing; transparent conducting oxides; zinc oxide
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 24743) publication
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Lecture (Conference)
Treffen der Nutzergruppen Heißprozesse und RTP und Ionenimplantation, 08.-09.12.2016, Erlangen, Deutschland
Permalink: https://www.hzdr.de/publications/Publ-24743
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