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Spectroscopic Ellipsometry - short course

Schumann, E.; Lungwitz, F.

Abstract

A short introduction into spectroscopic ellipsometry. Covering topics starting with the nature and description of polarized light. The optical constants and dielectric function is introduced and the interaction from light with bulk matter and multiple thin films is discussed. The first part concludes with the explanation of what an ellipsometer measures.
The second half of the course comprises basic analysis procedures, model building with oscillator models, fitting and walk through steps of some examples.

  • Lecture (others)
    Workshop, 15.10.2015, Sevilla, Espana

Permalink: https://www.hzdr.de/publications/Publ-22573


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