Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationStudy of Ion Beam Assisted Deposition of Al/AlN Multilayers by Comparison of Computer Simulation and Experiment
Wang, X.; Charlamov, V.; Kolitsch, A.; Posselt, M.; Trushin, Y.; Möller, W.
-
Journal of Physics D: Applied Physics 31 (1998) 2241-2244
DOI: 10.1088/0022-3727/31/18/007
Cited 8 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-1178
Years: 2023 2022 2021 2020 2019 2018 2017 2016 2015