Silicon-based MOS light emitters using rare earth implantation

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Skorupa, W.

Abstract

An overview on recent results regarding ion beam processing for silicon-based light emission using rare earths is presented

Keywords: rare earths; ion implantation; silicon-based light emission

Invited lecture (Conferences)
Silicon to Light & Light to Silicon - Materials, Characterisation and Applications, 09.-10.07.2007, Halle, Germany

Permalink: https://www.hzdr.de/publications/Publ-10514

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