Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Microstructural characterization of 3C-SiC thin films epitaxially formed by the flash lamp process (FLASIC)

Ferro, G.; Panknin, P.; Polychroniadis, E. K.; Monteil, Y.; Skorupa, W.; Stoemenos, J.

Keywords: flash lamp; annealing; SiC

• Vortrag (Konferenzbeitrag)
  5th Europ. Conf. Silicon Carbide and Related Materials, 31.08.-04.09.2004, Bologna, Italy

Permalink: https://www.hzdr.de/publications/Publ-9906