Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

1 Publikation

Photoluminescence of Er doped SiO2 films embedded Si nanoclusters using dual implantation chamber and annealing

Cheng, X. Q.; Sun, J. M.; Kögler, R.; Skorupa, W.; Möller, W.; Prucnal, S.; Zuk, J.

Abstract

The photoluminescence of Er doped SiO2 films embedded Si nanoclusters is investigated. These clusters are fabricated by dual ion implantation and annealing.

Keywords: Er doped Si nanoclusters; photoluminescence; dual ion implantation

  • Vortrag (Konferenzbeitrag)
    5th Int. Conf. on Ion Implantation and other Applications of Ions and Electrons (ION2004), 14.-17.06.2004, Kazimierz Dolny, Poland

Permalink: https://www.hzdr.de/publications/Publ-9902

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