The prototype of the new flash lamp apparatus: experiences, results, comparison old and new equipment

Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

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1 Publikation

Anwand, W.

Abstract

The prototype of the new flash lamp apparatus is discussed and compared with the old equipment. First experiences and results are reported.

Keywords: flash lamp annealing; semiconductor processing

Sonstiger Vortrag
EU-Projekttreffen FLASiC, 15.10.2004, Ilmenau, Deutschland

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