Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Recent developments and prospects of plasma based ion implantation

Möller, W.

• Vortrag (Konferenzbeitrag)
  13th International Conference on Surface Engineering, Chengdu, China, Oct. 10-13, 2002

Permalink: https://www.hzdr.de/publications/Publ-5316