Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Characteristics and applications of plasma immersion ion implantation

Möller, W.

• Vortrag (Konferenzbeitrag)
  Workshop "Puls Plasma Surface Technologies", Dresden, June 6, 2002

Permalink: https://www.hzdr.de/publications/Publ-5314