Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Techniques for depth profiling of dopants in 4H-SiC

Österman, J.; Hallen, A.; Anand, S.; Linnarson, M. K.; Andersson, H.; Aberg, D.; Panknin, D.; Skorupa, W.

• Materials Science Forum 353-356 (2001) 559

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