Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationNanocluster formation: Atomistic simulations and impact of atmospheric humidity
Heinig, K.-H.; Schmidt, B.; Müller, T.
Keywords: ion implantation; Ge and Si nanocluster formation; damaged oxide; moisture penetration
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Sonstiger Vortrag
EC project meeting NEON, CEMES/CNRS, Toulouse, France, Jan 31 -Feb 4, 2001
Permalink: https://www.hzdr.de/publications/Publ-4950
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