Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Integrated high voltage modulator for plasma immersion implantation

Rogozin, A.; Günzel, R.

• Vortrag (Konferenzbeitrag)
  6.th Int. Workshop on Plasma-based Ion Implantation, Grenoble, June 25-28, 2001

Permalink: https://www.hzdr.de/publications/Publ-4858