Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

The present investigation focuses on further development of the plasma based high voltage modulator for plasma immersion ion implantation (PIII) devices. The modulator produces high voltage pulses using grid controlled extraction of electrons from the plasma, which is used for the ion implantation. The operation features of the modulator in connection with an RF-plasma are described. The device is applied to implantations of stainless steel. The results indicate considerable hardness improvement, which confirm the practical use of the high voltage modulator.