Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationOrdered quantum dot arrays via sputtering
Facsko, S.; Bobek, T.; Kurz, H.; Dekorsy, T.
Abstract
The erosion of III -V compound semiconductors by low-energy Ar ions
under normal incidence leads to the formation of regular nanoscale
quantum dot arrays. We present the dependence of the formation
on ion energy for GaSb and compare them to simulations based on
a continuum equation.
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Vortrag (Konferenzbeitrag)
Gordon Conference "Material processes far from equilibrium", Meriden, NH, USA, July 1-6, 2001
Permalink: https://www.hzdr.de/publications/Publ-4691
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