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Structural peculiarities of metal alloy and multilayer films synthesized from the laser erosion plasma

Gorbunov, A.; Tselev, A.; Levin, A.; Mensch, A.; Meyer, D.; Noetzel, J.; Prokert, F.; Pompe, W.

Abstract

Results of experimental investigations of thin films and multilayers of binary systems deposited by PLD at room temperature are presented. Poles of sputtering, implantation, rapid quenching, and solid state diffusion in microstructure formation of thin metal an alloy films synthesized prom pulsed erosion jets are considered. Examples of non-conventional microstructure (amorphization, pseudomorphism, superstructures) formation are given.

Keywords: PLD; thin films; ion beams; microstructure; amorphization; superstructure

  • Poster
    Proc. SPIE
  • Abstract in referierter Zeitschrift
    Laser-Assisted Microtechnology 2000, ed. by V. P. Veiko, Proc. SPIE 4157, 257-262 (2001)
  • Beitrag zu fremdem Sammelwerk
    Proc. SPIE

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