Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

1 Publikation

Plasma immersion ion implantation using a glow discharge source with controlled plasma potential

Ueda, M.; Gomes, G. F.; Berni, L. A.; Rossi, J. O.; Barroso, J. J.; Beloto, A. F.; Abramof, E.; Reuther, H.

Abstract

A DC glow discharge plasma source was used in a PIII experiment.

  • Nuclear Instruments and Methods B 161-163 (2000) 1064-1068

Permalink: https://www.hzdr.de/publications/Publ-3558

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