Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationData publication: Controlled Silicidation of SiNW using FLA
Khan, M. B.; Prucnal, S.; Ghosh, S.; Deb, D.; Hübner, R.; Pohl, D.; Rebohle, L.; Mikolajick, T.; Erbe, A.; Georgiev, Y.
Abstract
The folder contains the following: 1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 33452) publication
- DOI: 10.1021/acs.langmuir.1c01862 references this (Id 33452) publication
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Controlled Silicidation of Silicon Nanowires using Flash Lamp Annealing
ROBIS: 33436 has used this (Id 33452) publication of HZDR-primary research data
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Forschungsdaten im HZDR-Daten-Repositorium RODARE
Publication date: 2021-11-23 Open access
DOI: 10.14278/rodare.1269
Versions: 10.14278/rodare.1270
License: CC-BY-4.0
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Permalink: https://www.hzdr.de/publications/Publ-33452
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