Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Determination of the as-implanted defect structure in silicon by a combined simulation method

Posselt, M.

• Vortrag (Konferenzbeitrag)
  MRS-ICAM99 Conference, Symposium JJ: Multiscale Materials Modeling, Beijing, China, June 13-18, 1999

Permalink: https://www.hzdr.de/publications/Publ-3151