Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

TEM investigation of C-Si defects in Carbon-implanted Silicon

Werner, P.; Kögler, R.; Eichler, D.; Skorupa, W.

• Beitrag zu fremdem Sammelwerk
  Proc. 11th Int. Conf. Ion Implantation Technology; The Inst. of Electrical and Electronics Eng., Piscataway, USA, 1997, p. 675

Permalink: https://www.hzdr.de/publications/Publ-2666