Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Electrical and microstructural effects in highly doped 6H-SiC after Al-implantation

Wirth, H.; Panknin, D.; Perez-Rodriguez, A.; Brauer, G.; Anwand, W.; Voelskow, M.; Skorupa, W.

• Vortrag (Konferenzbeitrag)
  40th Electronic Materials Conference (EMC´98), Charlottesville, Virginia, USA, June 24-26, 1998

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