Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Impurity gettering effects in separation-by-implanted-oxygen (SIMOX) structures: what getters what, where and how

Yankov, R. A.

• Sonstiger Vortrag
  Bell Labs, Lucent Technologies, Murray Hill, NJ, USA, Dec. 8, 1997

Permalink: https://www.hzdr.de/publications/Publ-2535