Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Interaction of high-energy ion beams with silicon: buried layers, gettering and defect engineering

Yankov, R. A.

• Sonstiger Vortrag
  VARIAN Company, Gloucester, MA, USA, Dec. 4, 1997

Permalink: https://www.hzdr.de/publications/Publ-2533