Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Simultaneous in situ ellipsometry and elastic recoil detection analysis during plasma processing

Fukarek, W.

• Vortrag (Konferenzbeitrag)
  ICSE-2, Charleston 1997

Permalink: https://www.hzdr.de/publications/Publ-2387