Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Preparation of CNx films by ion beam assisted filtered cathodic arc deposition

Spaeth, M.; Kühn, M.; Kreißig, U.; Richter, F.

• Diamond and Rel. Mat. 6 (1997) 626

Permalink: https://www.hzdr.de/publications/Publ-2351