Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Stabilisation of the 3C-SiC/SOI system by an intermediate Si₃N₄ layer

Zappe, S.; Obermeier, E.; Stoemenos, J.; Möller, H.; Krötz, G.; Wirth, H.; Skorupa, W.

• Vortrag (Konferenzbeitrag)
  ECSCRM '98 (2nd European Conf. on Silicon Carbide and Related Materials), Montpellier, Sept. 2 - 4, 1998

Permalink: https://www.hzdr.de/publications/Publ-2299