Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationSemiconductor nanocrystals embedded in high-k matarials
Brenner, F.; Haas, S.; Schneider, F.; Klemm, V.; Schreiber, G.; von Borany, J.; Heitmann, J.
Abstract
The combination of high-k materials and nanocrystalline semiconductors leads to remarkable properties for various applications. The phase separation of ZrGeO and ZrSiO films in superlattice geometries were investigated. In case of the Si containing films, round-shaped clusters within a crystalline ZrO2 matrix have been observed after annealing at 1000 °C.
The appearance of nanocrystalline Si could not be shown, whereas amorphous clusters within the crystalline ZrO2 matrix were formed. For the Ge containing films, the formation of Ge nanocrystals was observed after annealing at 650 °C. In both material systems the ZrO2 matrix crystallized in the tetragonal phase.
Keywords: nanocrystals; high-k materials; multilayers
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 18276) publication
-
Eingeladener Vortrag (Konferenzbeitrag)
221st Meeting of Electrochemical Society, Symposium Advanced Nanomaterials and Processing, 06.-10.05.2012, Seattle, USA
Permalink: https://www.hzdr.de/publications/Publ-18276
Jahre: 2023 2022 2021 2020 2019 2018 2017 2016 2015