Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

1 Publikation

Spontaneous formation of regular nanopattern on surfaces during thin film deposion and ion beam erosion

Heinig, K.-H.

Abstract

Ion erosion of surface results under specific conditions to formation of dot-like or ripple-like nanopattern. These self-organized nanopattern are promising for different nanotechnologies. The presentation gives an overview of experimental techniques and results as well theoretical models and simulation work.

Keywords: ion erosion; nanopattern; experiments; theory; kinteic Monte Carlo simulations

  • Eingeladener Vortrag (Konferenzbeitrag)
    Winter School on Nanoelectronic and Nanophotonics, 19.-25.01.2009, Ankara, Turkey

Permalink: https://www.hzdr.de/publications/Publ-12197


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