Nanofabrikation und Analyse
Leitung:
Prof. Dr. Artur Erbe
a.erbe@hzdr.de
Tel.: +49 351 260 2366
Team:
Name | Geb./Raum | +49 351 260 | Link | |
---|---|---|---|---|
Dr. Ciaran Fowley | 712/306 | 3253 | c.fowley![]() | Process Technology and Devices |
Process Technology and Devices![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() |
Clean Room![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() |
Wet chemistry![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() |
Photolithography![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() |
Reactive Ion Etching![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() |
Thermal Processing![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() |
Thin Film Deposition![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() |
Measurement techniques![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() |
Group Members![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() |
HZDR NanoFaRo Wiki![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() |
Head Nanoelectronics
a.erbehzdr.de
Phone: +49 351 260 2366
Cleanroom Manager
Postdoctoral researcher
Nanofabrication and Analysis
a.echreshhzdr.de
Phone: +49 351 260 3893
Head Nanofabrication and Analysis
c.fowleyhzdr.de
Phone: +49 351 260 3253
Prof. Dr. Artur Erbe
a.erbe@hzdr.de
Tel.: +49 351 260 2366
Name | Geb./Raum | +49 351 260 | Link | |
---|---|---|---|---|
Dr. Ciaran Fowley | 712/306 | 3253 | c.fowley![]() | Process Technology and Devices |
Bautzner Landstraße 400, 01328 Dresden - Germany
Phone: +49 351 260 - 0
Email: kontakt@hzdr.de