Equipment Nanocomposite Materials
ClusterTool - Multifunctional UHV System -
The ClusterTool offers excellent conditions to realize experiments and investigations for different materials systems. A major advantage of the setup is the ability to perform interdisciplinary multi-step experiments. In situ RBS, Raman, ERDA and Ellipsometry measurements allow detailed investigations of the materials structure and properties during annealing (up to 1000°C) without breaking the vacuum. Multi-step experiments involving thin film growth, annealing in vacuum or gas/plasma environments, surface and structure modification and ion beam analysis, provided by the 6 MV beamline of the Ion Beam Center at HZDR, can be performed at the ClusterTool.
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contact:
Dr. M. Krause, matthias.krause@hzdr.de(1), 0351 / 260 - 3578
System Components | Details | Raman spectroscopy chamber |
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distrubution chamber |
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environmental chamber |
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sputtering chamber |
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UHV tribometer |
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ion beam analysis chamber |
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storage chamber |
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Ion Beam Sputtering / Ion Beam Assisted Deposition (IBS/IBAD) - Dual ion beam deposition
High Power Impulse Magnetron sputtering setup (HiPIMS)
DC Magnetron sputtering setup
Annealing chamber
Nanoindenter UNAT from Asmec with Scratch Modul
Details |
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Angle of contact measuring device Krüss DSA 10
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Solid Spec 3700DUV (Shimadzu)
Ellipsometer (Woollam M-2000)
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