Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Plasma immersion ion implantation: Process, promises and prospects

Möller, W.

• Invited lecture (Conferences)
  15th International Colloquium on Plasma Processes, 05.-09.06.05, Autrans, France

Permalink: https://www.hzdr.de/publications/Publ-8296